概要

University
2026
Author

Serika Yuzuki

Published

May 14, 2026

\[ \require{physics} \require{mhchem} \]

順番

読んでいく順番の予定は次の通り

  1. (Uny et al. 2019) で \(\ce{TiAlN}\) についての熱力学的な背景を把握する。
  2. (Wurmitzer, n.d.) で表面反応の解析について把握する
  3. (Sato et al. 2025) で基板表面での反応について理解を深める
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References

Sato, Noboru, Jun Yamaguchi, Masahiro Koto, et al. 2025. “Theoretical Study on Gas-Phase Reactions During Chemical Vapor Deposition of TixAl1xN from TiCl4, AlCl3, and NH3.” International Journal of Chemical Kinetics 57 (1): 3–15. https://doi.org/10.1002/kin.21750.
Uny, Florent, Elisabeth Blanquet, Frédéric Schuster, and Frédéric Sanchette. 2019. Ti-Al-n-Based Hard Coatings: Thermodynamical Background, CVD Deposition, and Properties. A Review. Edited by Jaime Andres Perez-Taborda and Alba G. Avila Bernal. IntechOpen. https://doi.org/10.5772/intechopen.79747.
Wurmitzer, Michael Martin. n.d. Computational Analysis of Chemical Vapor Deposition for Nitride-Based Hard Coatings.