\[ \require{physics} \require{mhchem} \]
順番
読んでいく順番の予定は次の通り
- (Uny et al. 2019) で \(\ce{TiAlN}\) についての熱力学的な背景を把握する。
- (Wurmitzer, n.d.) で表面反応の解析について把握する
- (Sato et al. 2025) で基板表面での反応について理解を深める
References
Sato, Noboru, Jun Yamaguchi, Masahiro Koto, Hayato Kubo, Takanori Sugiyama, Takahito Tanibuchi, Momoko Deura, Takeshi Momose, and Yukihiro Shimogaki. 2025. “Theoretical Study on Gas-Phase Reactions During Chemical Vapor Deposition of TixAl1xN from TiCl4, AlCl3, and NH3.” International Journal of Chemical Kinetics 57 (1): 3–15. https://doi.org/10.1002/kin.21750.
Uny, Florent, Elisabeth Blanquet, Frédéric Schuster, and Frédéric Sanchette. 2019. “Ti-Al-N-Based Hard Coatings: Thermodynamical Background, CVD Deposition, and Properties. A Review.” In, edited by Jaime Andres Perez-Taborda and Alba G. Avila Bernal. IntechOpen. https://doi.org/10.5772/intechopen.79747.
Wurmitzer, Michael Martin. n.d. “Computational Analysis of Chemical Vapor Deposition for Nitride-Based Hard Coatings.”